Thin Film Deposition Techniques in Microelectronics

F. O. Sequeda

doi:10.1007/bf03257928

journal article Feb 01, 1986

Thin Film Deposition Techniques in Microelectronics

F. O. Sequeda

JOM Vol. 38 No. 2 pp. 55-65 · Springer Science and Business Media LLC

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Published: Feb 01, 1986
Vol/Issue: 38(2)
Pages: 55-65
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F. O. Sequeda

Cite This Article

F. O. Sequeda (1986). Thin Film Deposition Techniques in Microelectronics. JOM, 38(2), 55-65. https://doi.org/10.1007/bf03257928

Thin Film Deposition Techniques in Microelectronics

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