Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering

Monjoy Sreemany; Suchitra Sen

doi:10.1016/j.apsusc.2006.05.040

journal article Dec 01, 2006

Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering

Monjoy Sreemany Suchitra Sen

Applied Surface Science Vol. 253 No. 5 pp. 2739-2746 · Elsevier BV

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Published: Dec 01, 2006
Vol/Issue: 253(5)
Pages: 2739-2746
License: View

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Cite This Article

Monjoy Sreemany, Suchitra Sen (2006). Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering. Applied Surface Science, 253(5), 2739-2746. https://doi.org/10.1016/j.apsusc.2006.05.040

Effect of substrate temperature and annealing temperature on the structural, electrical and microstructural properties of thin Pt films by rf magnetron sputtering

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