Bimodal Ag nanoparticle formation in TiN thin films via ion implantation and thermal annealing

M. Popovic; V. Rajić; M. Novaković

doi:10.1016/j.surfcoat.2026.133474

journal article Jun 01, 2026

Bimodal Ag nanoparticle formation in TiN thin films via ion implantation and thermal annealing

M. Popovic

V. Rajić M. Novaković

Surface and Coatings Technology Vol. 529 pp. 133474 · Elsevier BV

View at Publisher Save 10.1016/j.surfcoat.2026.133474

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Details

Published: Jun 01, 2026
Vol/Issue: 529
Pages: 133474
License: View

Authors

Funding

Ministarstvo Prosvete, Nauke i Tehnološkog Razvoja Award: 451-03-33/2026-03/200017

Cite This Article

M. Popovic, V. Rajić, M. Novaković (2026). Bimodal Ag nanoparticle formation in TiN thin films via ion implantation and thermal annealing. Surface and Coatings Technology, 529, 133474. https://doi.org/10.1016/j.surfcoat.2026.133474

Bimodal Ag nanoparticle formation in TiN thin films via ion implantation and thermal annealing

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