Nanoporous Ultralow Dielectric Constant Organosilicates Templated by Triblock Copolymers

Shu Yang; Peter A. Mirau; Chien-Shing Pai; Omkaram Nalamasu; Elsa Reichmanis; Janice C. Pai; Yaw S. Obeng; Joko Seputro; Eric K. Lin; Hae-Jeong Lee; Jianing Sun; David W. Gidley

doi:10.1021/cm010690l

journal article Jan 01, 2002

Nanoporous Ultralow Dielectric Constant Organosilicates Templated by Triblock Copolymers

Shu Yang

Peter A. Mirau Chien-Shing Pai Omkaram Nalamasu Elsa Reichmanis

Janice C. Pai Yaw S. Obeng Joko Seputro Eric K. Lin Hae-Jeong Lee Jianing Sun David W. Gidley

Chemistry of Materials Vol. 14 No. 1 pp. 369-374 · American Chemical Society (ACS)

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Details

Published: Jan 01, 2002
Vol/Issue: 14(1)
Pages: 369-374

Authors

S

Shu Yang

Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 9333 S. John Young Parkway, Orlando, Florida 32819, National Institute of Standards and Technology, Polymers Division, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541, and Departments of Materials Science and Engineering and Physics, University of Michigan, Ann Arbor, Michigan 48109

P

Peter A. Mirau

Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 9333 S. John Young Parkway, Orlando, Florida 32819, National Institute of Standards and Technology, Polymers Division, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541, and Departments of Materials Science and Engineering and Physics, University of Michigan, Ann Arbor, Michigan 48109

C

Chien-Shing Pai

Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 9333 S. John Young Parkway, Orlando, Florida 32819, National Institute of Standards and Technology, Polymers Division, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541, and Departments of Materials Science and Engineering and Physics, University of Michigan, Ann Arbor, Michigan 48109

O

Omkaram Nalamasu

Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 9333 S. John Young Parkway, Orlando, Florida 32819, National Institute of Standards and Technology, Polymers Division, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541, and Departments of Materials Science and Engineering and Physics, University of Michigan, Ann Arbor, Michigan 48109

E

Elsa Reichmanis

Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 9333 S. John Young Parkway, Orlando, Florida 32819, National Institute of Standards and Technology, Polymers Division, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541, and Departments of Materials Science and Engineering and Physics, University of Michigan, Ann Arbor, Michigan 48109

J

Janice C. Pai

Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 9333 S. John Young Parkway, Orlando, Florida 32819, National Institute of Standards and Technology, Polymers Division, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541, and Departments of Materials Science and Engineering and Physics, University of Michigan, Ann Arbor, Michigan 48109

Y

Yaw S. Obeng

Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 9333 S. John Young Parkway, Orlando, Florida 32819, National Institute of Standards and Technology, Polymers Division, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541, and Departments of Materials Science and Engineering and Physics, University of Michigan, Ann Arbor, Michigan 48109

J

Joko Seputro

Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 9333 S. John Young Parkway, Orlando, Florida 32819, National Institute of Standards and Technology, Polymers Division, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541, and Departments of Materials Science and Engineering and Physics, University of Michigan, Ann Arbor, Michigan 48109

E

Eric K. Lin

Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 9333 S. John Young Parkway, Orlando, Florida 32819, National Institute of Standards and Technology, Polymers Division, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541, and Departments of Materials Science and Engineering and Physics, University of Michigan, Ann Arbor, Michigan 48109

H

Hae-Jeong Lee

Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 9333 S. John Young Parkway, Orlando, Florida 32819, National Institute of Standards and Technology, Polymers Division, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541, and Departments of Materials Science and Engineering and Physics, University of Michigan, Ann Arbor, Michigan 48109

J

Jianing Sun

Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 9333 S. John Young Parkway, Orlando, Florida 32819, National Institute of Standards and Technology, Polymers Division, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541, and Departments of Materials Science and Engineering and Physics, University of Michigan, Ann Arbor, Michigan 48109

D

David W. Gidley

Bell Laboratories, Lucent Technologies, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 600 Mountain Avenue, Murray Hill, New Jersey 07974, Agere Systems, 9333 S. John Young Parkway, Orlando, Florida 32819, National Institute of Standards and Technology, Polymers Division, 100 Bureau Drive, Gaithersburg, Maryland 20899-8541, and Departments of Materials Science and Engineering and Physics, University of Michigan, Ann Arbor, Michigan 48109

Cite This Article

Shu Yang, Peter A. Mirau, Chien-Shing Pai, et al. (2002). Nanoporous Ultralow Dielectric Constant Organosilicates Templated by Triblock Copolymers. Chemistry of Materials, 14(1), 369-374. https://doi.org/10.1021/cm010690l

Nanoporous Ultralow Dielectric Constant Organosilicates Templated by Triblock Copolymers

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