Surface-Controlled Deposition of Sc2O3 Thin Films by Atomic Layer Epitaxy Using β-Diketonate and Organometallic Precursors

Matti Putkonen; Minna Nieminen; Jaakko Niinistö; Lauri Niinistö; Timo Sajavaara

doi:10.1021/cm011138z

journal article Oct 12, 2001

Surface-Controlled Deposition of Sc2O3 Thin Films by Atomic Layer Epitaxy Using β-Diketonate and Organometallic Precursors

Matti Putkonen

Minna Nieminen Jaakko Niinistö Lauri Niinistö Timo Sajavaara

Chemistry of Materials Vol. 13 No. 12 pp. 4701-4707 · American Chemical Society (ACS)

View at Publisher Save 10.1021/cm011138z

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Details

Published: Oct 12, 2001
Vol/Issue: 13(12)
Pages: 4701-4707

Authors

M

Matti Putkonen

Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, FIN-02015 Espoo, Finland

M

Minna Nieminen

Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, FIN-02015 Espoo, Finland

J

Jaakko Niinistö

Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, FIN-02015 Espoo, Finland

L

Lauri Niinistö

Laboratory of Inorganic and Analytical Chemistry, Helsinki University of Technology, P.O. Box 6100, FIN-02015 Espoo, Finland

T

Timo Sajavaara

Accelerator Laboratory, University of Helsinki, P.O. Box 43, FIN-00014 Helsinki, Finland

Cite This Article

Matti Putkonen, Minna Nieminen, Jaakko Niinistö, et al. (2001). Surface-Controlled Deposition of Sc2O3 Thin Films by Atomic Layer Epitaxy Using β-Diketonate and Organometallic Precursors. Chemistry of Materials, 13(12), 4701-4707. https://doi.org/10.1021/cm011138z

Surface-Controlled Deposition of Sc2O3 Thin Films by Atomic Layer Epitaxy Using β-Diketonate and Organometallic Precursors

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