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References
150
[1]
Powell, C. J. Growth of surface analysis and the development of databases and modeling software for Auger-electron spectroscopy and X-ray photoelectron spectroscopy. Microsc. Today 24, 16 (2016). 10.1017/s1551929516000080
[2]
Powell, C. J. Improvements in the reliability of X-ray photoelectron spectroscopy for surface analysis. J. Chem. Educ. 81, 1734 (2004). 10.1021/ed081p1734
[3]
Fadley, C. S. X-ray photoelectron spectroscopy: progress and perspectives. J. Electron Spectros. Relat. Phenomena 178–179, 2 (2010). 10.1016/j.elspec.2010.01.006
[4]
Hofmann, S. Auger- and X-ray Photoelectron Spectroscopy in Materials Science (Springer-Verlag, 2013). 10.1007/978-3-642-27381-0
[5]
Hűfner, S. Photoelectron Spectroscopy: Principles and Applications (Springer-Verlag, 2003).
[6]
Briggs, D. & Grant, J. T. (eds) Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (IM Publications, 2003).
[7]
Baer, D. R. et al. Introduction to topical collection: reproducibility challenges and solutions with a focus on guides to XPS analysis. J. Vac. Sci. Technol. A 39, 021601 (2021). 10.1116/6.0000873
[8]
Greczynski, G. & Hultman, L. A step-by-step guide to perform X-ray photoelectron spectroscopy. J. Appl. Phys. 132, 011101 (2022). This work is a comprehensive guide to XPS. 10.1063/5.0086359
[9]
Major, G. H., Fernandez, V., Fairley, N., Smith, E. F. & Linford, M. R. Guide to XPS data analysis: applying appropriate constraints to synthetic peaks in XPS peak fitting. J. Vac. Sci. Technol. A 40, 063201 (2022). 10.1116/6.0001975
[10]
Bagus, P. S., Ilton, E. S. & Nelin, C. J. The interpretation of XPS spectra: insights into materials properties. Surf. Sci. Rep. 68, 273–304 (2013). 10.1016/j.surfrep.2013.03.001
[11]
Berni, M., Bontempi, M., Marchiori, G. & Gambardella, A. Roughness conformality during thin films deposition onto rough substrates: a quantitative study. Thin Solid Films 709, 138258 (2020). 10.1016/j.tsf.2020.138258
[12]
Hertz, H. Ueber sehr schnelle electrische Schwingungen [German]. Ann. Phys. 267, 421 (1887). 10.1002/andp.18872670707
[13]
Einstein, A. On a Heuristic point of view about the creation and conversion of light. Ann. Phys. 17, 132–148 (1905). 10.1002/andp.19053220607
[14]
Ashcroft, N. W. & Mermin, N. D. Solid State Physics (Saunders College Publishing, 1976).
[15]
Ishii, H., Sugiyama, K., Ito, E. & Seki, K. Energy level alignment and interfacial electronic structures at organic/metal and organic/organic interfaces. Adv. Mater. 11, 605–625 (1999). 10.1002/(sici)1521-4095(199906)11:8<605::aid-adma605>3.0.co;2-q
[16]
Cahen, D. & Kahn, A. Electron energetics at surfaces and interfaces: concepts and experiments. Adv. Matter 15, 271 (2003). 10.1002/adma.200390065
[17]
Meitner, L. Über die Entstehung der β-Strahl-Spektren radioaktiver Substanzen [German]. Z. Phys. 9, 131 (1922). 10.1007/bf01326962
[18]
Auger, P. Sur l’effet photoélectrique composé [French]. J. Phys. Radium 6, 205–208 (1925). 10.1051/jphysrad:0192500606020500
[19]
Sokolowski, E., Nordling, C. & Siegbahn, K. Chemical shift effect in inner electronic levels of Cu due to oxidation. Phys. Rev. 110, 776 (1958). 10.1103/physrev.110.776
[20]
Hagström, S., Nordling, C. & Siegbahn, K. Electron spectroscopy for chemical analyses. Phys. Lett. 9, 235–236 (1964). 10.1016/0031-9163(64)90062-9
[21]
Siegbahn, K. et al. ESCA — Atomic, Molecular and Solid State Structure Studied by Means of Electron Spectroscopy (Almquist & Wiksells, 1967).
[22]
Hagström, S., Nordling, C. & Siegbahn, K. Electron spectroscopic determination of the chemical valence state. Z. Phys. 178, 439–444 (1964). 10.1007/bf01379473
[23]
Fahlman, A. et al. Electron spectroscopy and chemical binding. Nature 210, 4–8 (1966). 10.1038/210004a0
[24]
Drummond, I. W. in Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (eds Briggs, D. & Grant, J. T.) 117–144 (IM Publications, 2003).
[25]
Egelhoff, W. F. Jr Core-level binding-energy shifts at surfaces and in solids. Surf. Sci. Rep. 6, 253–415 (1987). This work presents an exceptionally good overview of all basic concepts related to XPS such as binding energy, and initial and final state effects. 10.1016/0167-5729(87)90007-0
[26]
Pauling, L. The nature of the chemical bond. IV. The energy of single bonds and the relative electronegativity of atoms. J. Am. Chem. Soc. 54, 3570–3582 (1932). 10.1021/ja01348a011
[27]
International Organization for Standardization. ISO 18115-1, Surface Chemical Analysis — Vocabulary, Part 1 — General Terms and Terms Used in Spectroscopy (ISO, 2013).
[28]
Tanuma, S., Powell, C. J. & Penn, D. R. Calculations of electron inelastic mean free paths for 31 materials. Surf. Interf. Anal. 11, 577 (1988). 10.1002/sia.740111107
[29]
Tanuma, S., Powell, C. J. & Penn, D. R. Calculations of electron inelastic mean free paths II. Data for 27 elements over the 50–2000 eV range. Surf. Interf. Anal. 17, 911 (1991). 10.1002/sia.740171304
[30]
Tanuma, S., Powell, C. J. & Penn, D. R. Calculations of electron inelastic mean free paths III. Data for 15 organic compounds over the 50–2000 eV range. Surf. Interf. Anal. 17, 927 (1991). 10.1002/sia.740171305
[31]
Tanuma, S., Powell, C. J. & Penn, D. R. Calculations of electron inelastic mean free paths IV. Evaluation of calculated IMFPs and of the predictive IMFP formula TPP-2 for electron energies between 50 and 2000 eV. Surf. Interf. Anal. 21, 165 (1993). 10.1002/sia.740210302
[32]
Powell, C. J. Practical guide for inelastic mean free paths, effective attenuation lengths, mean escape depths, and information depths in X-ray photoelectron spectroscopy. J. Vac. Sci. Technol. A 38, 023209 (2020). This important paper explains subtle differences between various terms frequently used in XPS jargon. 10.1116/1.5141079
[33]
Tanuma, S., Powell, C. J. & Penn, D. R. Calculations of electron inelastic mean free paths. IX. Data for 41 elemental solids over the 50 eV to 30 keV range. Surf. Interf. Anal. 43, 689–713 (2011). This work is an extremely useful resource for electron inelastic mean free paths. 10.1002/sia.3522
[34]
Shinotsuka, H., Tanuma, S., Powell, C. J. & Penn, D. R. Calculations of electron inelastic mean free paths. Data for 41 elemental solids over the 50 eV to 200 keV range with the relativistic full Penn algorithm. Surf. Interf. Anal. 47, 871 (2015). 10.1002/sia.5789
[35]
Shinotsuka, H., Tanuma, S., Powell, C. J. & Penn, D. R. Calculations of electron inelastic mean free paths. XII. Data for 42 inorganic compounds over the 50 eV to 200 keV range with the full Penn algorithm. Surf. Interf. Anal. 51, 427 (2019). 10.1002/sia.6598
[36]
Tanuma, S. et al. Experimental determination of electron inelastic mean free paths in 13 elemental solids in the 50 to 5000 eV energy range by elastic-peak electron spectroscopy. Surf. Interf. Anal. 37, 833 (2005). 10.1002/sia.2102
[37]
Werner, W. S. M., Tomastik, C., Cabela, T., Richter, G. & Störi, H. Elastic electron reflection for determination of the inelastic mean free path of medium energy electrons in 24 elemental solids for energies between 50 and 3400 eV. J. Electron. Spectros. Relat. Phenomena 113, 127 (2001). 10.1016/s0368-2048(00)00280-2
[38]
Seah, M. P. & Dench, W. A. Quantitative electron spectroscopy of surfaces: a standard data base for electron inelastic mean free paths in solids. Surf. Interf. Anal. 1, 2–11 (1979). 10.1002/sia.740010103
[39]
Seah, M. P. Simple universal curve for the energy‐dependent electron attenuation length for all materials. Surf. Interf. Anal. 44, 1353–1359 (2012). 10.1002/sia.5033
[40]
Huchital, D. A. & McKeon, R. T. Use of an electron flood gun to reduce surface charging in X‐ray photoelectron spectroscopy. Appl. Phys. Lett. 20, 158 (1972). 10.1063/1.1654090
[41]
Baer, D. R. et al. XPS guide: charge neutralization and binding energy referencing for insulating samples. J. Vac. Sci. Technol. A 38, 031204 (2020). 10.1116/6.0000057
[42]
Edwards, L., Mack, P. & Morgan, D. J. Recent advances in dual mode charge compensation for XPS analysis. Surf. Interf. Anal. 51, 925–933 (2019). 10.1002/sia.6680
[43]
Greczynski, G., Petrov, I., Greene, J. E. & Hultman, L. Al capping layers for non-destructive X-ray photoelectron spectroscopy analyses of transition-metal nitride thin films. J. Vac. Sci. Technol. A 33, 05E101 (2015). 10.1116/1.4916239
[44]
Haasch, R. T., Patscheider, J., Hellgren, N., Petrov, I. & Greene, J. E. The Si3N4/TiN Interface: 1. TiN(001) grown and analyzed in situ using angle-resolved X-ray photoelectron spectroscopy. Surf. Sci. Spectra 19, 33 (2012). 10.1116/11.20121001
[45]
Lewin, E., Counsell, J. & Patscheider, J. Spectral artefacts post sputter-etching and how to cope with them — a case study of XPS on nitride-based coatings using monoatomic and cluster ion beams. Appl. Surf. Sci. 442, 487 (2018). This work is a good comparison of how etching with Ar+ ions and Ar ion clusters affects surface chemistry for nitride-based thin films. 10.1016/j.apsusc.2018.02.191
[46]
Seah, M. P. in Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (eds Briggs, D. & Grant, J. T.) 167–189 (IM Publications, 2003).
[47]
International Organization for Standardization. ISO 15472:2010, Surface chemical analysis — X-ray photoelectron spectrometers — Calibration of energy scales (ISO, 2010).
[48]
Stevie, F. A., Garcia, R., Shallenberger, J., Newman, J. G. & Donley, C. L. Sample handling, preparation and mounting for XPS and other surface analytical techniques. J. Vac. Sci. Technol. A 38, 063202 (2020). This work is an excellent overview of all issues related to sample preparation and handling. 10.1116/6.0000421
[49]
Major, G. H. et al. Practical guide for curve fitting in X-ray photoelectron spectroscopy. J. Vac. Sci. Technol. A 38, 061203 (2020). This work is a very comprehensive source of information for peak fitting XPS spectra. 10.1116/6.0000377
[50]
Gadzuk, J. W. & Doniach, S. A soluble relaxation model for core level spectroscopy on adsorbed atoms. Surf. Sci. 77, 154855 (1978). 10.1016/0039-6028(78)90131-0

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The Journal of Physical Chemistry C
Nature Reviews Materials
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Published
May 25, 2023
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Grzegorz Greczynski, Richard T. Haasch, Niklas Hellgren, et al. (2023). X-ray photoelectron spectroscopy of thin films. Nature Reviews Methods Primers, 3(1). https://doi.org/10.1038/s43586-023-00225-y
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