journal article
Nov 27, 2006
Nanobumps on silicon created with polystyrene spheres and 248 or 308nm laser pulses
Abstract
Huang et al. [Appl. Phys. Lett. 86, 161911 (2005)] formed arrays of nanobumps on a silicon substrate. They applied a 248nm laser pulse to a surface monolayer of 1-μm-diameter polystyrene spheres. The authors first replicated their experiment with 248nm light. But when 308nm pulses were applied instead, the nanobumps had a different shape and composition. At 248nm, much of the laser light is absorbed in the polystyrene, which serves to quickly distort, melt, and ablate the sphere. At 308nm, very little light is absorbed. The nanobumps from 248nm radiation are organic polymers, while those formed with 308nm pulses are silicon based.
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References
24
[1]
Rom. Rep. Phys. (2005)
[2]
Appl. Phys. A: Mater. Sci. Process. (2004)
[3]
Appl. Phys. A: Mater. Sci. Process. (2003) 10.1007/s003390101426
[4]
Appl. Surf. Sci. (2003) 10.1016/s0169-4332(02)01278-3
[5]
Opt. Commun. (2003) 10.1016/j.optcom.2003.09.075
[6]
Appl. Phys. Lett. (2005) 10.1063/1.1886896
[7]
J. Appl. Phys. (2001) 10.1063/1.1359154
[8]
Appl. Phys. Lett. (2004) 10.1063/1.1762978
[9]
Nanotechnology (2003) 10.1088/0957-4484/14/5/305
[10]
Appl. Phys. A: Mater. Sci. Process. (2004) 10.1007/s00339-004-2644-8
[11]
Bandrup (1979)
[12]
J. Quant. Spectrosc. Radiat. Transf. (2004) 10.1016/j.jqsrt.2004.05.026
[13]
[14]
Mater. Res. Soc. Symp. Proc. (1986) 10.1557/proc-72-241
[15]
Pyda (1994)
[16]
Phys. Rev. B (1977) 10.1103/physrevb.15.3243
[17]
Int. J. Thermophys. (2002) 10.1023/a:1016394104244
[18]
Chem. Rev. (Washington, D.C.) (1989) 10.1021/cr00096a003
[19]
J. Appl. Phys. (1994) 10.1063/1.358487
[20]
J. Appl. Phys. (2002) 10.1063/1.1503854
[21]
Chem. Rev. (Washington, D.C.) (2003) 10.1021/cr010460q
[22]
Annu. Rep. Prog. Chem., Sect. C: Phys. Chem. (2005) 10.1039/b408910n
[23]
J. Micromech. Microeng. (2004) 10.1088/0960-1317/14/8/018
[24]
Appl. Phys. A: Mater. Sci. Process. (2003) 10.1007/s00339-002-1761-5
Metrics
18
Citations
24
References
Details
- Published
- Nov 27, 2006
- Vol/Issue
- 89(22)
Authors
Cite This Article
Reema Piparia, Erhard W. Rothe, R. J. Baird (2006). Nanobumps on silicon created with polystyrene spheres and 248 or 308nm laser pulses. Applied Physics Letters, 89(22). https://doi.org/10.1063/1.2397569
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