journal article
Feb 07, 2018
Restoration of perovskite phase in the top layer of thin BTO film by plasma treatment and annealing
Abstract
Abstract
We report a simple method to restore the perovskite phase in the top surface/sub-surface region of a thin film (~100 nm) of barium titanate (BTO) fabricated by pulsed laser deposition on a platinized silicon surface and thus enhance its dielectric and ferroelectric properties. Phase evolution, surface morphology with local chemical composition of as-grown BTO films have been studied as a function of laser fluence. Investigations using x-ray diffraction, grazing-angle incidence x-ray diffraction and depth resolved x-ray photoelectron spectroscopy show that even after achieving a good phase formation there can be a presence of non-perovskite TiO
2
phase at the surface and subsurface in such films that degrades its dielectric and ferroelectric response. The restoration of the degraded top layer was done by a combination of low energy Ar plasma treatment followed by an annealing process that enhances Ba content.
We report a simple method to restore the perovskite phase in the top surface/sub-surface region of a thin film (~100 nm) of barium titanate (BTO) fabricated by pulsed laser deposition on a platinized silicon surface and thus enhance its dielectric and ferroelectric properties. Phase evolution, surface morphology with local chemical composition of as-grown BTO films have been studied as a function of laser fluence. Investigations using x-ray diffraction, grazing-angle incidence x-ray diffraction and depth resolved x-ray photoelectron spectroscopy show that even after achieving a good phase formation there can be a presence of non-perovskite TiO
2
phase at the surface and subsurface in such films that degrades its dielectric and ferroelectric response. The restoration of the degraded top layer was done by a combination of low energy Ar plasma treatment followed by an annealing process that enhances Ba content.
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Citations
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References
Details
- Published
- Feb 07, 2018
- Vol/Issue
- 51(8)
- Pages
- 085304
- License
- View
Authors
Cite This Article
Subhamita Sengupta, Ankita Ghatak, Shaili Sett, et al. (2018). Restoration of perovskite phase in the top layer of thin BTO film by plasma treatment and annealing. Journal of Physics D: Applied Physics, 51(8), 085304. https://doi.org/10.1088/1361-6463/aaa7dd
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