On the relationship between yield and cycle time in semiconductor wafer fabrication

L.M. Wein

doi:10.1109/66.136277

journal article May 01, 1992

On the relationship between yield and cycle time in semiconductor wafer fabrication

IEEE Transactions on Semiconductor Manufacturing Vol. 5 No. 2 pp. 156-158 · Institute of Electrical and Electronics Engineers (IEEE)

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References

7

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10.1109/66.16999

[2]

kleinrock Queueing Systems Volume I Theory (1975)

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schmenner "The merit of making things fast" Sloan Management Review (1988)

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osburn "The effects of contamination on semiconductor manufacturing yield" Journal of the Environmental Sciences (1988)

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schonberger Japanese Manufacturing Techniques Nine Hidden Lessons in Simplicity (1982)

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10.1109/66.53188

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10.1287/opre.36.2.202

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52

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Details

Published: May 01, 1992
Vol/Issue: 5(2)
Pages: 156-158
License: View

Authors

L

L.M. Wein

Cite This Article

L.M. Wein (1992). On the relationship between yield and cycle time in semiconductor wafer fabrication. IEEE Transactions on Semiconductor Manufacturing, 5(2), 156-158. https://doi.org/10.1109/66.136277

On the relationship between yield and cycle time in semiconductor wafer fabrication

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