Microfabrication of On-Demand Tapered Glass Capillaries by Etching Combined With Polishing

Chunyang Wei; Chengzhuang Yu; Shanshan Li; Jiyu Meng; Tiejun Li; Feng Pan; Junwei Li

doi:10.1109/jmems.2022.3163281

journal article Jun 01, 2022

Microfabrication of On-Demand Tapered Glass Capillaries by Etching Combined With Polishing

Chunyang Wei Chengzhuang Yu Shanshan Li

Jiyu Meng Tiejun Li

Feng Pan

Junwei Li

Journal of Microelectromechanical Systems Vol. 31 No. 3 pp. 473-480 · Institute of Electrical and Electronics Engineers (IEEE)

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References

36

[1]

10.1039/c9lc00204a

[2]

10.1021/acs.nanolett.0c04713

[3]

10.1021/acs.analchem.8b00048

[4]

10.1088/0960-1317/26/10/105013

[5]

10.1038/micronano.2016.91

[6]

10.1016/0029-5493(93)90092-n

[7]

10.1002/smll.201904344

[8]

10.1016/j.ijpharm.2016.11.024

[9]

10.1017/s0022112094002090

[10]

10.1038/nprot.2009.234

[11]

10.1039/c6lc01018k

[12]

10.1016/j.bios.2004.02.020

[13]

10.1039/c3lc50783a

[14]

10.1016/j.snb.2020.128503

[15]

10.1039/d0lc00292e

[16]

10.1016/j.mvr.2010.07.002

[17]

10.1007/s10404-010-0618-z

[18]

10.1088/0960-1317/4/4/004

[19]

10.1021/ie100099g

[20]

10.1039/c003504a

[21]

10.1039/b813061b

[22]

10.1016/j.aca.2021.339283

[23]

10.1007/s00170-020-05051-0

[24]

10.1007/s00170-012-4554-9

[25]

10.1111/j.2041-1294.2010.00001.x

[26]

10.1007/978-1-4757-0328-3

[27]

10.3390/coatings8050181

[28]

10.1007/bf02704843

[29]

10.1016/j.molliq.2017.03.096

[30]

10.1016/j.ces.2018.10.029

[31]

10.1371/journal.pone.0062583

[32]

10.1016/j.foodchem.2021.129525

[33]

10.1088/1361-6439/aafd9d

[34]

10.1101/pdb.prot5586

[35]

10.1007/s00170-021-07202-3

[36]

10.1007/s00170-014-5718-6

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Details

Published: Jun 01, 2022
Vol/Issue: 31(3)
Pages: 473-480
License: View

Authors

C

Chunyang Wei