In Situ Probe Measurements of Plasma Parameters during the Deposition of Boron Coatings by the Magnetron Method

V. I. Gushenets; A. S. Bugaev; A. V. Vizir; E. M. Oks; A. G. Nikolaev; G. Yu. Yushkov

doi:10.1134/s1063784224070156

journal article Jul 01, 2024

In Situ Probe Measurements of Plasma Parameters during the Deposition of Boron Coatings by the Magnetron Method

V. I. Gushenets A. S. Bugaev A. V. Vizir E. M. Oks A. G. Nikolaev G. Yu. Yushkov

Technical Physics Vol. 69 No. 7 pp. 1967-1972 · Pleiades Publishing Ltd

View at Publisher Save 10.1134/s1063784224070156

Topics

No keywords indexed for this article. Browse by subject →

References

20

[1]

I. Campos, M. Palomar, A. Amador, R. Ganem, J. Martinez. Surf. Coat. Technol., 201, 2438 (2006). https://doi.org/10.1016/j.surfcoat.2006.04.017 10.1016/j.surfcoat.2006.04.017

[2]

C. V. Robino, M. J. Cieslak. Metall. Mater. Trans. A, 26 (7), 1673 (1995). https://doi.org/10.1007/BF02670754 10.1007/bf02670754

[3]

M. Kulka, N. Makuch, A. Piasecki. Surf. Coat. Technol., 325, 515 (2017). https://doi.org/10.1016/j.surfcoat.2017.07.020 10.1016/j.surfcoat.2017.07.020

[4]

A. N. Simonenko, V. A. Shestakov, V. N. Poboinya. Metal Science and Heat Treatment, 24 (5), 360 (1982). https://doi.org/10.1007/BF00782814 10.1007/bf00782814

[5]

B. Sarma, N. Tikekar, K.S. Ravi. Chandran. Ceramics International, 38 (8), 6795 (2012). https://doi.org/10.1016/j.ceramint.2012.05.077 10.1016/j.ceramint.2012.05.077

[6]

E. Rodríguez Cabeo, G. Laudien, S. Biemer, K.-T. Rie, S. Hoppe. Surf. Coat. Technol., 116-119, 229 (1999). https://doi.org/10.1016/S0257-8972(99)00116-4 10.1016/s0257-8972(99)00116-4

[7]

E. M. Oks, A. Anders, A. G. Nikolaev, Yu. G. Yushkov. Rev. Sci. Instrum., 88, 043506 (2017). https://doi.org/10.1063/1.4980149 10.1063/1.4980149

[8]

E. S. Greiner, J. A. Gutowski. J. Appl. Phys., 28 (11), 1364 (1957). https://doi.org/10.1063/1.1722660 10.1063/1.1722660

[9]

V. I. Gushenets, E. M. Oks, K. P. Savkin, A. V. Vizir, G. Yu. Yushkov, A. Hershcovitch, T. V. Kulevoy. Rev. Sci. Instrum., 81, 02B303 (2010). https://doi.org/10.1063/1.3258029 10.1063/1.3258029

[10]

Xu Sun, Xiaofei Liu, Jun Yin, Jin Yu, Yao Li, Yang Hang, Xiaocheng Zhou, Maolin Yu, Jidong Li, Guoan Tai, Wanlin Guo. Adv. Functional Mater., 27 (19), 1603300 (2017). https://doi.org/10.1002/adfm.201603300 10.1002/adfm.201603300

[11]

H. M. Mott-Smith, I. Langmuir. Phys. Rev., 28 (4), 727 (1926). https://doi.org/10.1103/PhysRev.28.727 10.1103/physrev.28.727

[12]

A. V. Vizir, A. G. Nikolaev, E. M. Oks, V. P. Frolova, A. A. Cherkasov, M. V. Shandrikov, G. Yu. Yushkov. Russ. Phys. J., 64 (12), 2177 (2022). https://doi.org/10.1007/s11182-022-02574-9 10.1007/s11182-022-02574-9

[13]

P. V. Kashtanov, B. M. Smirnov, R. Hippler. Physics-Uspekhi, 50 (5), 455 (2007). https://doi.org/10.1070/PU2007v050n05ABEH006138 10.1070/pu2007v050n05abeh006138

[14]

T. E. Sheridan, M. J. Goeckner, J. Goree. J. Vac. Sci. Technol. A, 9 (3), 688 (1991). https://doi.org/10.1116/1.577344 10.1116/1.577344

[15]

V. Karzin, V. Smirnov. J. Phys.: Conf. Ser., 729, 012021 (2016). https://doi.org/10.1088/1742-6596/729/1/012021 10.1088/1742-6596/729/1/012021

[16]

D. J. Field, S. K. Dew, R. E. Burrell. J. Vac. Sci. Technol. A, 20 (6), 2032 (2002). https://doi.org/10.1116/1.1515800 10.1116/1.1515800

[17]

Bon-Woong Koo, Noah Hershkowitz, Moshe Sarfaty. J. Appl. Phys., 86 (3), 1213 (1999). https://doi.org/10.1063/1.370873 10.1063/1.370873

[18]

W. Lochte-Holtgreven (Editor) Plasma Diagnostics (North-Holland, Amsterdam, 1968).

[19]

R. L. Merlino. Am. J. Phys., 75 (12), 1078 (2007). https://doi.org/10.1119/1.2772282 10.1119/1.2772282

[20]

D. Bohm Chap. 3 in book The Characteristics of Electrical Discharges in Magnetic Fields A. Guthrie, R. K. Wakerling (Eds.), (McGraw-Hill, 1949).

Metrics

1

Citations

20

References

Details

Published: Jul 01, 2024
Vol/Issue: 69(7)
Pages: 1967-1972
License: View

Authors

Cite This Article

V. I. Gushenets, A. S. Bugaev, A. V. Vizir, et al. (2024). In Situ Probe Measurements of Plasma Parameters during the Deposition of Boron Coatings by the Magnetron Method. Technical Physics, 69(7), 1967-1972. https://doi.org/10.1134/s1063784224070156

In Situ Probe Measurements of Plasma Parameters during the Deposition of Boron Coatings by the Magnetron Method

You May Also Like