journal article Oct 01, 1984

The Homogeneous Nucleation of Condensed Silicon in the Gaseous Si‐H‐Cl System

Carlyle S. Herrick David W. Woodruff

Journal of The Electrochemical Society Vol. 131 No. 10 pp. 2417-2422 · The Electrochemical Society

View at Publisher Save 10.1149/1.2115307

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Published: Oct 01, 1984
Vol/Issue: 131(10)
Pages: 2417-2422
License: View

Authors

Carlyle S. Herrick

General Electric Company, Corporate Research and Development, Schenectady, New York 12345

David W. Woodruff

General Electric Company, Corporate Research and Development, Schenectady, New York 12345

Cite This Article

Carlyle S. Herrick, David W. Woodruff (1984). The Homogeneous Nucleation of Condensed Silicon in the Gaseous Si‐H‐Cl System. Journal of The Electrochemical Society, 131(10), 2417-2422. https://doi.org/10.1149/1.2115307

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