journal article Aug 01, 1979

The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions

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Published
Aug 01, 1979
Vol/Issue
126(8)
Pages
1406-1415
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A. Reisman, M. Berkenblit, S. A. Chan, et al. (1979). The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions. Journal of The Electrochemical Society, 126(8), 1406-1415. https://doi.org/10.1149/1.2129289
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