Electrical Properties and Interfacial Characteristics of RuO[sub 2]∕HfAlO[sub x]∕SiON∕Si and RuO[sub 2]∕LaAlO[sub 3]∕SiON∕Si Capacitors

V. Edon; Z. Li; M.-C. Hugon; C. Krug; K. P. Bastos; L. Miotti; I. J. R. Baumvol; C. Cardinaud; O. Durand; C. Eypert

doi:10.1149/1.2952529

journal article Jan 01, 2008

Electrical Properties and Interfacial Characteristics of RuO[sub 2]∕HfAlO[sub x]∕SiON∕Si and RuO[sub 2]∕LaAlO[sub 3]∕SiON∕Si Capacitors

V. Edon Z. Li

M.-C. Hugon C. Krug

K. P. Bastos L. Miotti I. J. R. Baumvol C. Cardinaud O. Durand C. Eypert

Journal of The Electrochemical Society Vol. 155 No. 9 pp. H661 · The Electrochemical Society

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Published: Jan 01, 2008
Vol/Issue: 155(9)
Pages: H661

Authors

Cite This Article

V. Edon, Z. Li, M.-C. Hugon, et al. (2008). Electrical Properties and Interfacial Characteristics of RuO[sub 2]∕HfAlO[sub x]∕SiON∕Si and RuO[sub 2]∕LaAlO[sub 3]∕SiON∕Si Capacitors. Journal of The Electrochemical Society, 155(9), H661. https://doi.org/10.1149/1.2952529

Electrical Properties and Interfacial Characteristics of RuO[sub 2]∕HfAlO[sub x]∕SiON∕Si and RuO[sub 2]∕LaAlO[sub 3]∕SiON∕Si Capacitors

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