Investigation of Volmer-Weber Growth during the Nucleation Phase of ALD Platinum Thin Films and Template Based Platinum Nanotubes

Pragya Shrestha; Diefeng Gu; Ngoc Tran; Kandabara Tapily; Helmut Baumgart; Gon Namkoong

doi:10.1149/1.3485249

journal article Oct 01, 2010

Investigation of Volmer-Weber Growth during the Nucleation Phase of ALD Platinum Thin Films and Template Based Platinum Nanotubes

Pragya Shrestha

Diefeng Gu Ngoc Tran Kandabara Tapily Helmut Baumgart

Gon Namkoong

ECS Transactions Vol. 33 No. 2 pp. 127-134 · The Electrochemical Society

View at Publisher Save 10.1149/1.3485249

Abstract

Platinum thin films have been deposited by atomic layer deposition (ALD) using MeCpPtMe3 and oxygen as precursors. The nucleation phase of ALD Pt thin film deposition has been found to follow a Volmer-Weber island growth mechanism resulting in Pt nano dots and discontinuous films. Regular monolayer by monolayer ALD growth kicks in once the Pt film reaches a critical thickness of about 15 nm. Beyond the nucleation phase ALD Pt proceeds at a linear deposition rate of 0.5Aå/cycle. ALD growth of platinum was extended to nanoporous templates and platinum nanotubes were synthesized using porous alumina templates.

Topics

No keywords indexed for this article. Browse by subject →

Cited By

21

ALD nano-catalyst for micro-calorimetric detection of hydrocarbons

Ferenc Bíró, Csaba Dücső · 2017

Sensors and Actuators B: Chemical

Pt–Al2O3dual layer atomic layer deposition coating in high aspect ratio nanopores

Gaspard Pardon, Hithesh K Gatty · 2012

Nanotechnology

Metrics

21

Citations

0

References

Details

Published: Oct 01, 2010
Vol/Issue: 33(2)
Pages: 127-134
License: View

Authors

Department of Electrical and Computer Engineering, Old Dominion University, Norfolk, VA 23529, USA; ODU-Applied Research Center at Thomas Jefferson National Accelerator Laboratories, 12050 Jefferson Avenue, Suite 721, Newport News, VA 23606, USA

G

Gon Namkoong

Cite This Article

Pragya Shrestha, Diefeng Gu, Ngoc Tran, et al. (2010). Investigation of Volmer-Weber Growth during the Nucleation Phase of ALD Platinum Thin Films and Template Based Platinum Nanotubes. ECS Transactions, 33(2), 127-134. https://doi.org/10.1149/1.3485249

Investigation of Volmer-Weber Growth during the Nucleation Phase of ALD Platinum Thin Films and Template Based Platinum Nanotubes

You May Also Like