Internal Friction and Young's Modulus Measurements on SiO2 and Ta2O5 Films Done with an Ultra-High Q Silicon-Wafer Suspension

M. Granata; L. Balzarini; J. Degallaix; V. Dolique; R. Flaminio; D. Forest; D. Hofman; C. Michel; R. Pedurand; L. Pinard; B. Sassolas; N. Straniero; J. Teillon; G. Cagnoli

doi:10.1515/amm-2015-0060

journal article Open Access Apr 01, 2015

Internal Friction and Young's Modulus Measurements on SiO2 and Ta2O5 Films Done with an Ultra-High Q Silicon-Wafer Suspension

M. Granata

L. Balzarini J. Degallaix

V. Dolique R. Flaminio D. Forest D. Hofman C. Michel

R. Pedurand L. Pinard

B. Sassolas

N. Straniero J. Teillon G. Cagnoli

Archives of Metallurgy and Materials Vol. 60 No. 1 pp. 365-370 · Polish Academy of Sciences Chancellery

View at Publisher Save 10.1515/amm-2015-0060

Abstract

Abstract
In order to study the internal friction of thin films a nodal suspension system called GeNS (Gentle Nodal Suspension) has been developed. The key features of this system are: i) the possibility to use substrates easily available like silicon wafers; ii) extremely low excess losses coming from the suspension system which allows to measure Q factors in excess of 2×108 on 3” diameter wafers; iii) reproducibility of measurements within few percent on mechanical losses and 0.01% on resonant frequencies; iv) absence of clamping; v) the capability to operate at cryogenic temperatures. Measurements at cryogenic temperatures on SiO2 and at room temperature only on Ta2O5 films deposited on silicon are presented.

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References

13

[1]

Magalas "Recent advances in determination of the logarithmic decrement and the resonant frequency in low - frequency mechanical spectroscopy Sol St" Phen (2008)

[2]

Callen "Irreversibility and generalized noise" Phys Rev (1951)

[3]

Li "Measurements of mechan - ical thermal noise and energy dissipation in optical dielectric coatings" Phys Rev (2014)

[4]

Purdi "Observation of radiation pressure shot noise on a macroscopic object" Science (2013)

[5]

Notcutt "Contribution of thermal noise to frequency stability of rigid optical cavity via Hertz - linewidth lasers" Phys Rev A (2006)

[6]

Saulson "Thermal noise in mechanical experiments" Phys Rev (1990)

[7]

Magalas "Mechanical spectroscopy - Fundamentals Sol St" Phen (2003)

[8]

Abernathy "Investigation of the Young s modulus and thermal expansion of amorphous titania - doped tantala films" Applied Optics (2014)

[9]

Magalas "Determination of the logarithmic decrement in mechanical spectroscopy Sol St" Phen (2006)

[10]

Cesarini "giovanni A gentle nodal suspension for measurements of the acoustic attenuation in materials" Rev Sci Instrum (2009)

[11]

Etienne "Mechanical spectroscopy and other relaxation spectroscopies Sol St" Phen (2003)

[12]

Pitkin "Gravitational wave de - tection by interferometry ( Ground and Space ) Living Rel ativity http www livingreviews org lrr" Rev (2011)

[13]

Magalas "Advanced Techniques for De - termining high and extreme high damping : OMI - A new algorithm to compute the logarithmic decrement Key" Eng Mat (2006)

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Details

Published: Apr 01, 2015
Vol/Issue: 60(1)
Pages: 365-370
License: View

Authors

Université de Lyon

Université de Lyon

Université de Lyon

Université de Lyon; National Astronomical Observatory of Japan

Université de Lyon

Université de Lyon

Université de Lyon

Université de Lyon

Université de Lyon

Université de Lyon

Université de Lyon; Université de Lyon

Cite This Article

M. Granata, L. Balzarini, J. Degallaix, et al. (2015). Internal Friction and Young's Modulus Measurements on SiO2 and Ta2O5 Films Done with an Ultra-High Q Silicon-Wafer Suspension. Archives of Metallurgy and Materials, 60(1), 365-370. https://doi.org/10.1515/amm-2015-0060

Internal Friction and Young's Modulus Measurements on SiO2 and Ta2O5 Films Done with an Ultra-High Q Silicon-Wafer Suspension

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