Micro-Electromechanical System-Based Parasitic Patch Antenna on Quartz Substrate for High Gain

Haoran Zhao; Qi Wang; Jianyu Du; Lang Chen; Wen Yue; Wei Wang

doi:10.3390/s25030607

journal article Open Access Jan 21, 2025

Micro-Electromechanical System-Based Parasitic Patch Antenna on Quartz Substrate for High Gain

Haoran Zhao

Sensors Vol. 25 No. 3 pp. 607 · MDPI AG

View at Publisher Save 10.3390/s25030607

Abstract

This paper presents a novel Ku-band parasitic patch antenna based on MEMS technology. The antenna consists of two substrates that are bonded together. The lower substrate houses the main patch and the ground layer, while the upper substrate supports the parasitic patch. To minimize the dielectric loss, the parasitic patch is fabricated using a double-layer suspended film process, combining parylene C and Spin-on-glass (SOG) materials. The two substrates are also bonded using SOG. The proposed antenna achieves a measured bandwidth of 30% (11.1~15.01 GHz), a peak gain of 8.57 dBi, and a compact size of 0.87 × 0.87 × 0.09 λ03.

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Details

Published: Jan 21, 2025
Vol/Issue: 25(3)
Pages: 607
License: View

Authors

H

Haoran Zhao

School of Engineering and Technology, China University of Geosciences (Beijing), Beijing 100083, China; School of Integrated Circuits, Peking University, Beijing 100871, China

Q

Qi Wang

School of Integrated Circuits, Peking University, Beijing 100871, China

J

Jianyu Du

School of Integrated Circuits, Peking University, Beijing 100871, China

L

Lang Chen

School of Integrated Circuits, Peking University, Beijing 100871, China

W

Wen Yue

School of Engineering and Technology, China University of Geosciences (Beijing), Beijing 100083, China; Zhengzhou Institute, China University of Geosciences (Beijing), Zhengzhou 451283, China

W

Wei Wang

School of Integrated Circuits, Peking University, Beijing 100871, China; National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Beijing 100871, China

Cite This Article

Haoran Zhao, Qi Wang, Jianyu Du, et al. (2025). Micro-Electromechanical System-Based Parasitic Patch Antenna on Quartz Substrate for High Gain. Sensors, 25(3), 607. https://doi.org/10.3390/s25030607

Micro-Electromechanical System-Based Parasitic Patch Antenna on Quartz Substrate for High Gain

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