Researcher Profile

V. I. Shevyakov

Publications

Citations

Co-Authors

Active Years

Publications

Journal Article Russian Microelectronics Dec 01, 2025

Investigation of the Influence of the Design of Alignment Marks and the Used Diffraction Order on the Amount of Overlay in Submicron Photolithography in the Formation of Thick-Film Aluminum Wiring of Silicon Semiconductor Structures

Yu. A. Chaplygin · D. Yu. Shelkunov · V. I. Shevyakov

10.1134/s1063739725601742

Journal Article Russian Microelectronics Dec 01, 2025

Development of a Methodology for Characterization the Effect of Local Mismatch of MOSFET Parameters

D. N. Mayfet · S. O. Belostotskaya · A. D. Rudenko · A. V. Shemyakin +1 more

10.1134/s1063739725601754

Journal Article Russian Microelectronics Dec 01, 2025

Study of the Influence of Mo–Si Structural Parameters on the Optical Properties of Masking Coatings for Photomasks

N. V. Krokhan · R. A. Sharipov · A. I. Novoseltsev · O. V. Novikova +2 more

10.1134/s106373972560133x

Journal Article Russian Aeronautics Jan 01, 2022

About the Use of Vortex Generators to Improve Aircraft Aerodynamics

V. G. Tsipenko · V. I. Shevyakov

10.3103/s1068799822010184

Journal Article Nanotechnologies in Russia Nov 01, 2018

Formation of Piezo- and Pyroelectric Matrices with the Use of Nanoprofiled Silica

A. N. Belov · A. A. Golishnikov · G. N. Pestov · A. V. Solnyshkin +1 more

10.1134/s1995078018060034 2 citations

Journal Article Nanotechnologies in Russia Mar 01, 2013

Investigation into the effect of cantilever structural parameters on the sensitivity of magnetic force microscopy

Yu. A. Chaplygin · V. I. Shevyakov

10.1134/s1995078013020031 4 citations

Journal Article Semiconductors Dec 01, 2010

Kinetics of local probe oxidation of ultrathin V, Nb, Ta, Ti, TiN, and W metal films

I. V. Sagunova · V. I. Shevyakov · S. A. Gavrilov · A. N. Belov

10.1134/s106378261013018x 3 citations

Publication Timeline

2025

2022

2018

2013

2010

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