J

Researcher Profile

J. H. Klootwijk

2

Publications

337

Citations

8

Co-Authors

2

Active Years

Publications

Journal Article Journal of The Electrochemical Society Jan 01, 2011

Dielectric Properties of Thermal and Plasma-Assisted Atomic Layer Deposited Al[sub 2]O[sub 3] Thin Films

K. B. Jinesh · J. L. van Hemmen · M. C. M. van de Sanden · F. Roozeboom +3 more

10.1149/1.3517430 77 citations

Journal Article Journal of The Electrochemical Society Jan 01, 2007

Plasma and Thermal ALD of Al[sub 2]O[sub 3] in a Commercial 200 mm ALD Reactor

J. L. van Hemmen · S. B. S. Heil · J. H. Klootwijk · F. Roozeboom +3 more

10.1149/1.2737629 260 citations

Publication Timeline

2011

1

2007

1

Frequent Co-Authors

W. M. M. Kessels

M. C. M. van de Sanden

J. L. van Hemmen

W. F. A. Besling