S

Researcher Profile

Schubert Chu

🏛 Applied Materials Sunnyvale California 94085

2

Publications

55

Citations

10

Co-Authors

2

Active Years

Publications

Journal Article Journal of the American Ceramic Society Jan 06, 2014

Significant Enhancement of the Dielectric Constant through the Doping of CeO 2 into HfO 2 by Atomic Layer Deposition

Woo‐Hee Kim · Min‐Kyu Kim · Il‐Kwon Oh · Wan Joo Maeng +6 more

10.1111/jace.12762 21 citations

Journal Article Journal of The Electrochemical Society Jan 01, 2011

Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition

Woo-Hee Kim · W. J. MAENG · Julien Gatineau · Venkat Pallem +5 more

10.1149/1.3594766 34 citations

Publication Timeline

2014

1

2011

1

Frequent Co-Authors

Christian Dussarrat

Julien Gatineau