T

Researcher Profile

Tzu-Sou Chuang

2

Publications

20

Citations

7

Co-Authors

2

Active Years

Publications

Journal Article Chemosphere Jan 01, 2024

Characteristics of inorganic acid emission from various generation semiconductor manufacturing factories

Ming-Peng Yeh · Lian-Fang Wu · En-Tsu Fan · Tony Chen +3 more

10.1016/j.chemosphere.2023.140745 17 citations

Journal Article Journal of the Chinese Institute of Engineers Dec 01, 2013

Ultra-pure air (UPA) for AMC control in nano-processing environment

Tzu-Sou Chuang · Luh-Maan Chang

10.1080/02533839.2012.747046 3 citations

Publication Timeline

2024

1

2013

1

Frequent Co-Authors