G

Researcher Profile

Gregory Denbeaux

1

Publications

6

Citations

10

Co-Authors

1

Active Years

Publications

Journal Article Materials Today Aug 01, 2025

Ultralow line edge roughness of hybrid multilayer Extreme ultraviolet resist with vertical molecular wire structure

Jaehyuk Lee · Hyeonseok Ji · Chawon Koh · Juyeong Lee +18 more

10.1016/j.mattod.2025.04.007 6 citations

Publication Timeline

2025

1

Frequent Co-Authors

Bruno La Fontaine