journal article Nov 01, 2015

High performance thin film transistors using low-temperature solution-processed Li-incorporated In2O3/ZrO2 stacks

Manh-Cuong Nguyen Seung-Won You Duc-Tai Tong Hyun-Joon Bang Dong-Hwi Lee Musarrat Hasan Jae Kyeong Jeong

Hoichang Yang Rino Choi

Microelectronic Engineering Vol. 147 pp. 27-30 · Elsevier BV

View at Publisher Save 10.1016/j.mee.2015.04.060

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References

7

[1]

Wang Adv. Mater. (2007) 10.1002/adma.200700393

[2]

Kim Nat. Mater. (2011) 10.1038/nmat3011

[3]

Park ACS Appl. Mater. Interfaces (2013) 10.1021/am402153g

[4]

Hasan Jpn. J. Appl. Phys. (2013) 10.7567/jjap.52.100206

[5]

Adamopoulos Adv. Mater. (2010) 10.1002/adma.201001444

[6]

Kim Phys. Stat. Sold. RRL (2014) 10.1002/pssr.201409402

[7]

Segawa Mater. Sci. (2011) 10.1007/s10853-011-5263-8

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Citations

7

References

Details

Published: Nov 01, 2015
Vol/Issue: 147
Pages: 27-30
License: View

Authors

Manh-Cuong Nguyen

Jae Kyeong Jeong

Department of Chemical and Biological Engineering and Rensselaer Nanotechnology Center, Rensselaer Polytechnic Institute, Troy, New York 12180

Department of Materials Science and Engineering, Inha University, Incheon 22212, Republic of Korea; Program in Semiconductor Convergence, Inha University, Incheon 22212, Republic of Korea; 3D Convergence Center, Inha University, Incheon 22212, Republic of Korea

Funding

Inha University Research

Cite This Article

Manh-Cuong Nguyen, Seung-Won You, Duc-Tai Tong, et al. (2015). High performance thin film transistors using low-temperature solution-processed Li-incorporated In2O3/ZrO2 stacks. Microelectronic Engineering, 147, 27-30. https://doi.org/10.1016/j.mee.2015.04.060

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