Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum

Adriaan J. M. Mackus; Noémi Leick; Layton Baker; Wilhelmus M. M. Kessels

doi:10.1021/cm203812v

journal article May 07, 2012

Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum

Adriaan J. M. Mackus Noémi Leick Layton Baker Wilhelmus M. M. Kessels

Chemistry of Materials Vol. 24 No. 10 pp. 1752-1761 · American Chemical Society (ACS)

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Details

Published: May 07, 2012
Vol/Issue: 24(10)
Pages: 1752-1761

Authors

A

Adriaan J. M. Mackus

Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

N

Noémi Leick

Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

L

Layton Baker

Department of Chemistry and Biochemistry and Department of Chemical and Biological Engineering, University of Colorado, Boulder, Colorado 80309, United States

W

Wilhelmus M. M. Kessels

Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

Cite This Article

Adriaan J. M. Mackus, Noémi Leick, Layton Baker, et al. (2012). Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum. Chemistry of Materials, 24(10), 1752-1761. https://doi.org/10.1021/cm203812v

Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum

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