Low-Temperature Atomic Layer Deposition of Platinum Using (Methylcyclopentadienyl)trimethylplatinum and Ozone

Jolien Dendooven; Ranjith K. Ramachandran; Kilian Devloo-Casier; Geert Rampelberg; Matthias Filez; Hilde Poelman; Guy B. Marin; Emiliano Fonda; Christophe Detavernier

doi:10.1021/jp403455a

journal article Sep 26, 2013

Low-Temperature Atomic Layer Deposition of Platinum Using (Methylcyclopentadienyl)trimethylplatinum and Ozone

Jolien Dendooven

Ranjith K. Ramachandran

Kilian Devloo-Casier Geert Rampelberg Matthias Filez Hilde Poelman Guy B. Marin

Emiliano Fonda

Christophe Detavernier

The Journal of Physical Chemistry C Vol. 117 No. 40 pp. 20557-20561 · American Chemical Society (ACS)

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Metrics

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Citations

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References

Details

Published: Sep 26, 2013
Vol/Issue: 117(40)
Pages: 20557-20561

Authors

J

Jolien Dendooven

Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, 9000 Ghent, Belgium,

R

Ranjith K. Ramachandran

Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, 9000 Ghent, Belgium,

K

Kilian Devloo-Casier

Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, 9000 Ghent, Belgium,

G

Geert Rampelberg

Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, 9000 Ghent, Belgium,

M

Matthias Filez

Laboratory for Chemical Technology, Ghent University, Krijgslaan 281/S5, 9000 Ghent, Belgium,

H

Hilde Poelman

Laboratory for Chemical Technology, Ghent University, Krijgslaan 281/S5, 9000 Ghent, Belgium,

G

Guy B. Marin

Laboratory for Chemical Technology, Ghent University, Krijgslaan 281/S5, 9000 Ghent, Belgium,

E

Emiliano Fonda

Synchrotron SOLEIL, L′Orme des Merisiers, Saint-Aubin, BP48, 91192 Gif-sur-Yvette Cedex, France

C

Christophe Detavernier

Department of Solid State Sciences, COCOON, Ghent University, Krijgslaan 281/S1, 9000 Ghent, Belgium,

Cite This Article

Jolien Dendooven, Ranjith K. Ramachandran, Kilian Devloo-Casier, et al. (2013). Low-Temperature Atomic Layer Deposition of Platinum Using (Methylcyclopentadienyl)trimethylplatinum and Ozone. The Journal of Physical Chemistry C, 117(40), 20557-20561. https://doi.org/10.1021/jp403455a

Low-Temperature Atomic Layer Deposition of Platinum Using (Methylcyclopentadienyl)trimethylplatinum and Ozone

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