Ultrahigh-mobility semiconducting epitaxial graphene on silicon carbide

Schwierz, F., Pezoldt, J. & Granzner, R. Two-dimensional materials and their prospects in transistor electronics. Nanoscale 7, 8261–8283 (2015). 10.1039/c5nr01052g

[2]

Van Bommel, A. J., Crombeen, J. E. & Van Tooren, A. LEED and Auger electron observations of the SiC(0001) surface. Surf. Sci. 48, 463–472 (1975). 10.1016/0039-6028(75)90419-7

[3]

Norimatsu, W. & Kusunoki, M. Growth of graphene from SiC{0001} surfaces and its mechanisms. Semicond. Sci. Technol. 29, 064009 (2014). 10.1088/0268-1242/29/6/064009

[4]

Band Gap Opening Induced by the Structural Periodicity in Epitaxial Graphene Buffer Layer

Maya N. Nair, Irene Palacio, Arlensiú Celis et al.

Nano Letters 2017 10.1021/acs.nanolett.7b00509

[5]

Turmaud, J.-P. Variable Range Hopping Conduction in the Epitaxial Graphene Buffer Layer on SiC(0001). Georgia Institute of Technology, PhD thesis (2018).

[6]

Chen, A., Hutchby, J., Zhirnov, V. & Bourianoff, G. (eds) Emerging Nanoelectronic Devices (Wiley, 2015). 10.1002/9781118958254

[7]

de Heer, W. A., Berger, C. & First, P. N. Patterned thin film graphite devices and method for making same. US patent 7,015,142 B2 (2006).

[8]

Berger, C. et al. Ultrathin epitaxial graphite: 2D electron gas properties and a route toward graphene-based nanoelectronics. J. Phys. Chem. B 108, 19912–19916 (2004). 10.1021/jp040650f

[9]

Nakada, K., Fujita, M., Dresselhaus, G. & Dresselhaus, M. S. Edge state in graphene ribbons: nanometer size effect and edge shape dependence. Phys. Rev. B 54, 17954–17961 (1996). 10.1103/physrevb.54.17954

[10]

Electronic transport in two-dimensional graphene

S. Das Sarma, Shaffique Adam, E. H. Hwang et al.

Reviews of Modern Physics 2011 10.1103/revmodphys.83.407

[11]

Han, M. Y., Özyilmaz, B., Zhang, Y. & Kim, P. Energy band-gap engineering of graphene nanoribbons. Phys. Rev. Lett. 98, 206805 (2007). 10.1103/physrevlett.98.206805

[12]

Stergiou, A., Cantón-Vitoria, R., Psarrou, M. N., Economopoulos, S. P. & Tagmatarchis, N. Functionalized graphene and targeted applications – highlighting the road from chemistry to applications. Prog. Mater Sci. 114, 100683 (2020). 10.1016/j.pmatsci.2020.100683

[13]

Two-dimensional semiconductors for transistors

Manish Chhowalla, Debdeep Jena, Hua Zhang

Nature Reviews Materials 2016 10.1038/natrevmats.2016.52

[14]

Interaction, growth, and ordering of epitaxial graphene on SiC{0001} surfaces: A comparative photoelectron spectroscopy study

K. V. Emtsev, F. Speck, Th. Seyller et al.

Physical Review B 2008 10.1103/physrevb.77.155303

[15]

Riedl, C., Coletti, C. & Starke, U. Structural and electronic properties of epitaxial graphene on SiC(0 0 0 1): a review of growth, characterization, transfer doping and hydrogen intercalation. J. Phys. D 43, 374009 (2010). 10.1088/0022-3727/43/37/374009

[16]

de Heer, W. A. et al. Large area and structured epitaxial graphene produced by confinement controlled sublimation of silicon carbide. Proc. Natl Acad. Sci. USA 108, 16900–16905 (2011). 10.1073/pnas.1105113108

[17]

de Heer, W. A. Graphene transistor. US patent 9,171,907 B2 (2015).

[18]

Nevius, M. S. et al. Semiconducting graphene from highly ordered substrate interactions. Phys. Rev. Lett. 115, 136802 (2015). 10.1103/physrevlett.115.136802

[19]

Cheng, L., Zhang, C. & Liu, Y. Why two-dimensional semiconductors generally have low electron mobility. Phys. Rev. Lett. 125, 177701 (2020). 10.1103/physrevlett.125.177701

[20]

Emery, J. D. et al. Chemically resolved interface structure of epitaxial graphene on SiC(0001). Phys. Rev. Lett. 111, 215501 (2013). 10.1103/physrevlett.111.215501

[21]

Conrad, M. et al. Structure and evolution of semiconducting buffer graphene grown on SiC(0001). Phys. Rev. B 96, 195304 (2017). 10.1103/physrevb.96.195304

[22]

Goler, S. et al. Revealing the atomic structure of the buffer layer between SiC(0001) and epitaxial graphene. Carbon 51, 249–254 (2013). 10.1016/j.carbon.2012.08.050

[23]

Tairov, Y. M. & Tsvetkov, V. F. Progress in controlling the growth of polytypic crystals. Prog. Cryst. Growth Charact. 7, 111–162 (1983). 10.1016/0146-3535(83)90031-x

[24]

Bao, J., Yasui, O., Norimatsu, W., Matsuda, K. & Kusunoki, M. Sequential control of step-bunching during graphene growth on SiC (0001). Appl. Phys. Lett. 109, 081602 (2016). 10.1063/1.4961630

[25]

Honstein, G., Chatillon, C. & Baillet, F. Thermodynamic approach to the vaporization and growth phenomena of SiC ceramics. I. SiC and SiC–SiO2 mixtures under neutral conditions. J. Eur. Ceram. Soc. 32, 1117–1135 (2012). 10.1016/j.jeurceramsoc.2011.11.032

[26]

Müller, G. & Friedrich J. in Encyclopedia of Condensed Matter Physics (eds Bassani, F. et al.) 262–274 (Elsevier, 2005). 10.1016/b0-12-369401-9/00416-2

[27]

Huang, L. et al. High-contrast SEM imaging of supported few-layer graphene for differentiating distinct layers and resolving fine features: there is plenty of room at the bottom. Small 14, 1704190 (2018). 10.1002/smll.201704190

[28]

Raman Spectrum of Graphene and Graphene Layers

A. C. Ferrari, J. C. Meyer, V. Scardaci et al.

Physical Review Letters 2006 10.1103/physrevlett.97.187401

[29]

Kunc, J., Hu, Y., Palmer, J., Berger, C. & de Heer, W. A. A method to extract pure Raman spectrum of epitaxial graphene on SiC. Appl. Phys. Lett. 103, 201911 (2013). 10.1063/1.4830374

[30]

Gammelgaard, L. et al. Graphene transport properties upon exposure to PMMA processing and heat treatments. 2D Mater. 1, 035005 (2014). 10.1088/2053-1583/1/3/035005

[31]

Donato, N. & Udrea, F. Static and dynamic effects of the incomplete ionization in superjunction devices. IEEE Trans. Electron Devices 65, 4469–4475 (2018). 10.1109/ted.2018.2867058

[32]

Vallejos-Burgos, F., Coudert, F.-X. & Kaneko, K. Air separation with graphene mediated by nanowindow-rim concerted motion. Nat. Commun. 9, 1812 (2018). 10.1038/s41467-018-04224-6

[33]

Li, M. et al. Electronically engineered interface molecular superlattices: STM study of aromatic molecules on graphite. Phys. Rev. B 76, 155438 (2007). 10.1103/physrevb.76.155438

[34]

Sul, O. et al. Reduction of hole doping of chemical vapor deposition grown graphene by photoresist selection and thermal treatment. Nanotechnology 27, 505205 (2016). 10.1088/0957-4484/27/50/505205

[35]

Jariwala, D. et al. Band-like transport in high mobility unencapsulated single-layer MoS2 transistors. Appl. Phys. Lett. 102, 173107 (2013). 10.1063/1.4803920

[36]

Li, J.-T. et al. Localized tail state distribution and hopping transport in ultrathin zinc-tin-oxide thin film transistor. Appl. Phys.Lett. 110, 023504 (2017). 10.1063/1.4973992

[37]

Chen, J. H. et al. Charged-impurity scattering in graphene. Nat. Phys. 4, 377–381 (2008). 10.1038/nphys935

[38]

Kittel, C. Introduction to Solid State Physics, 8th edn (2004, Wiley).

[39]

Graphene transistors

Frank Schwierz

Nature Nanotechnology 2010 10.1038/nnano.2010.89

[40]

de Heer, W. A. Patterned graphene nanoelectronics. Georgia Tech Library Archive. https://doi.org/10.35090/gatech/69985 (2022). 10.35090/gatech/69985

[41]

de Heer, W. A. The invention of graphene electronics and the physics of epitaxial graphene on silicon carbide. Phys. Scr. 2012, 014004 (2012). 10.1088/0031-8949/2012/t146/014004

[42]

Maboudian, R., Carraro, C., Senesky, D. G. & Roper, C. S. Advances in silicon carbide science and technology at the micro- and nanoscales. J. Vacuum Sci. Technol. A 31, 050805 (2013). 10.1116/1.4807902

[43]

Schlecht, M. T. et al. An efficient terahertz rectifier on the graphene/SiC materials platform. Sci. Rep. 9, 11205 (2019). 10.1038/s41598-019-47606-6

[44]

Epping, A. et al. Insulating state in low-disorder graphene nanoribbons. Phys, Status Solidi 256, 1900269 (2019). 10.1002/pssb.201900269

[45]

Prudkovskiy, V. S. et al. An epitaxial graphene platform for zero-energy edge state nanoelectronics. Nat. Commun. 13, 7814 (2022). 10.1038/s41467-022-34369-4

[46]

Briggs, N. et al. Epitaxial graphene/silicon carbide intercalation: a minireview on graphene modulation and unique 2D materials. Nanoscale 11, 15440–15447 (2019). 10.1039/c9nr03721g

[47]

Gigliotti, J. et al. Highly ordered boron nitride/epigraphene epitaxial films on silicon carbide by lateral epitaxial deposition. ACS Nano 14, 12962–12971 (2020). 10.1021/acsnano.0c04164

[48]

Ottapilakkal, V. et al. Thermal stability of thin hexagonal boron nitride grown by MOVPE on epigraphene. J. Cryst. Growth 603, 127030 (2023). 10.1016/j.jcrysgro.2022.127030

[49]

Speck, F. et al. The quasi-free-standing nature of graphene on H-saturated SiC(0001). Appl. Phys. Lett, 99, 122106 (2011). 10.1063/1.3643034

[50]

Palmer, J. et al. Controlled epitaxial graphene growth within removable amorphous carbon corrals. Appl. Phys. Lett, 105, 023106 (2014). 10.1063/1.4890499

Showing 50 of 51 references

Cited By

154

Lignocellulosic Films: Preparation, Properties, and Applications

Haishun Du, Kun Liu · 2025

Chemical Reviews

Metrics

154

Citations

51

References

Details

Published: Jan 03, 2024
Vol/Issue: 625(7993)
Pages: 60-65
License: View

Authors

J

Jian Zhao

Division of Molecular Biology of the Cell II, German Cancer Research Center, Im Neuenheimer Feld 280 D‐69120 Heidelberg Germany

Key Laboratory of Metallurgical Emission Reduction & Resources Recycling, Ministry of Education, School of Metallurgical Engineering, Anhui University of Technology, Ma’anshan 243002, China; School of Chemistry and Chemical Engineering, Anhui Province Key Laboratory of Coal Clean Conversion and High Valued Utilization, Anhui University of Technology, Ma’anshan 243002, China

Shanghai Jiao Tong University

W

Walt A. de Heer

Center for Nanoscale Science and Engineering, Departments of Chemistry and Chemical & Environmental Engineering, University of California, Riverside, California 92521 and School of Physics, Georgia Institute of Technology, Atlanta, Georgia 30332

Cite This Article

Jian Zhao, Peixuan Ji, Yaqi Li, et al. (2024). Ultrahigh-mobility semiconducting epitaxial graphene on silicon carbide. Nature, 625(7993), 60-65. https://doi.org/10.1038/s41586-023-06811-0

Ultrahigh-mobility semiconducting epitaxial graphene on silicon carbide

You May Also Like