Effectiveness of X-ray grating interferometry for non-destructive inspection of packaged devices

Masato Uehara; Wataru Yashiro; Atsushi Momose

doi:10.1063/1.4823982

journal article Oct 03, 2013

Effectiveness of X-ray grating interferometry for non-destructive inspection of packaged devices

Masato Uehara

Wataru Yashiro Atsushi Momose

Journal of Applied Physics Vol. 114 No. 13 · AIP Publishing

View at Publisher Save 10.1063/1.4823982

Abstract

It is difficult to inspect packaged devices such as IC packages and power modules because the devices contain various components, such as semiconductors, metals, ceramics, and resin. In this paper, we demonstrated the effectiveness of X-ray grating interferometry (XGI) using a laboratory X-ray tube for the industrial inspection of packaged devices. The obtained conventional absorption image showed heavy-elemental components such as metal wires and electrodes, but the image did not reveal the defects in the light-elemental components. On the other hand, the differential phase-contrast image obtained by XGI revealed microvoids and scars in the encapsulant of the samples. The visibility contrast image also obtained by XGI showed some cracks in the ceramic insulator of power module sample. In addition, the image showed the silicon plate surrounded by the encapsulant having the same X-ray absorption coefficient. While these defects and components are invisible in the conventional industrial X-ray imaging, XGI thus has an attractive potential for the industrial inspection of the packaged devices.

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Details

Published: Oct 03, 2013
Vol/Issue: 114(13)

Authors

M

Masato Uehara

Measurement Solution Research Center, National Institute of Advanced Industrial Science and Technology (AIST) 1 , 807-1, Shuku-machi, Tosu, Saga 841-0052, Japan

W

Wataru Yashiro

Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University 2 , 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan

A

Atsushi Momose

Institute of Multidisciplinary Research for Advanced Materials (IMRAM), Tohoku University 2 , 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan

Cite This Article

Masato Uehara, Wataru Yashiro, Atsushi Momose (2013). Effectiveness of X-ray grating interferometry for non-destructive inspection of packaged devices. Journal of Applied Physics, 114(13). https://doi.org/10.1063/1.4823982

Effectiveness of X-ray grating interferometry for non-destructive inspection of packaged devices

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