M

Researcher Profile

Mario Baum

1

Publications

15

Citations

5

Co-Authors

1

Active Years

Publications

Open Access Journal Article ECS Journal of Solid State Science and Technology Jul 01, 2021

Low-Temperature Parylene-Based Adhesive Bonding Technology for 150 and 200 mm Wafers for Fully Biocompatible and Highly Reliable Microsystems

Franz Selbmann · Mario Baum · Christoph Meinecke · Maik Wiemer +2 more

10.1149/2162-8777/ac12b6 15 citations

Publication Timeline

2021

1

Frequent Co-Authors

Christoph Meinecke