R

Researcher Profile

R.R. Manory

1

Publications

8

Citations

3

Co-Authors

1

Active Years

Publications

Journal Article Thin Solid Films Jan 01, 1988

A comparative study of silicon deposition from SiCl4 in cold plasma using argon, H2 or Ar + H2

R.R. Manory · U. Carmi · R. Avni · A. Grill

10.1016/0040-6090(88)90284-2 8 citations

Publication Timeline

1988

1

Frequent Co-Authors