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Researcher Profile

Karsten Arts

🏛 Department of Applied Physics, Eindhoven University of Technology 1 , P.O. Box 513, 5600 MB Eindhoven,

0000-0003-4266-6559

3

Publications

299

Citations

10

Co-Authors

3

Active Years

Publications

Open Access Journal Article Plasma Sources Science and Technology Oct 01, 2022

Foundations of atomic-level plasma processing in nanoelectronics

Karsten Arts · Satoshi Hamaguchi · Tomoko Ito · Kazuhiro Karahashi +3 more

10.1088/1361-6595/ac95bc 56 citations

Journal Article Journal of Vacuum Science & Technology A: Vacuum, S... Mar 18, 2019

Status and prospects of plasma-assisted atomic layer deposition

Harm C. M. Knoops · Tahsin Faraz · Karsten Arts · Wilhelmus M. M. (Erwin) Kessels

10.1116/1.5088582 199 citations

Journal Article Journal of Applied Physics Jul 20, 2017

Correlating the silicon surface passivation to the nanostructure of low-temperature a-Si:H after rapid thermal annealing

Bart Macco · Jimmy Melskens · Nikolas J. Podraza · Karsten Arts +3 more

10.1063/1.4994795 44 citations

Publication Timeline

2022

1

2019

1

2017

1

Frequent Co-Authors

Wilhelmus M. M. (Erwin) Kessels

Wilhelmus M. M. Kessels

Nikolas J. Podraza

Harm C. M. Knoops

Adriaan J M Mackus

Harm C M Knoops

Kazuhiro Karahashi

Christopher Pugh