I

Researcher Profile

Igor Krylov

🏛 Tower Semiconductor Ltd. 1 , Ramat Gavriel Industrial Park, Migdal HaEmek 2310502, Israel

1

Publications

14

Citations

5

Co-Authors

1

Active Years

Publications

Journal Article Journal of Vacuum Science & Technology A: Vacuum, S... Mar 16, 2020

Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition

Igor Krylov · Yuanshen Qi · Valentina Korchnoy · Kamira Weinfeld +2 more

10.1116/6.0000028 14 citations

Publication Timeline

2020

1

Frequent Co-Authors

Moshe Eizenberg

Kamira Weinfeld

Valentina Korchnoy