H

Researcher Profile

Hidemitsu Aoki

1

Publications

7

Citations

3

Co-Authors

1

Active Years

Publications

Journal Article Japanese Journal of Applied Physics Dec 01, 1992

Low-Temperature Etching of 0.2 µm Al Patterns Using a SiO2 Mask

Hidemitsu Aoki · Toshiki Hashimoto · Eiji Ikawa Eiji Ikawa · Takamaro Kikkawa Takamaro Kikkawa

10.1143/jjap.31.4376 7 citations

Publication Timeline

1992

1

Frequent Co-Authors

Takamaro Kikkawa Takamaro Kikkawa

Eiji Ikawa Eiji Ikawa

Toshiki Hashimoto