U

Researcher Profile

U. Heisig

1

Publications

37

Citations

5

Co-Authors

1

Active Years

Publications

Journal Article Thin Solid Films Dec 01, 1979

Advances in high rate sputtering with magnetron-plasmatron processing and instrumentation

S. Schiller · U. Heisig · K. Goedicke · K. Schade +2 more

10.1016/0040-6090(79)90330-4 37 citations

Publication Timeline

1979

1

Frequent Co-Authors