A

Researcher Profile

Arous Arshak

1

Publications

17

Citations

4

Co-Authors

1

Active Years

Publications

Journal Article Superlattices and Microstructures Jul 01, 2004

A novel focused-ion-beam lithography process for sub-100 nanometer technology nodes

Khalil Arshak · Miroslav Mihov · Shohei Nakahara · Arous Arshak +1 more

10.1016/j.spmi.2004.08.030 17 citations

Publication Timeline

2004

1

Frequent Co-Authors

Declan McDonagh

Shohei Nakahara