H

Researcher Profile

Haruo Sudo

🏛 GlobalWafers Japan Co., Ltd.

2

Publications

0

Citations

10

Co-Authors

1

Active Years

Publications

Journal Article The Proceedings of The Computational Mechanics Conferen... Jan 01, 2025

Data assimilation for accurate simulation of oxygen precipitate distributions in Si wafers during the cascade process.

Takuya Kusunoki · Junta Abe · Yuta Nagai · Haruo Sudo +7 more

10.1299/jsmecmd.2025.38.os10-15

Journal Article The Proceedings of The Computational Mechanics Conferen... Jan 01, 2025

Genetic Algorithm-Assisted Searching for Stable Atomic Configurations of Vacancy – Oxygen Complexes in RTP Wafers.

Hiroya Iwashiro · Hibiki BEKKU · Haruo Sudo · Ken Hayakawa +2 more

10.1299/jsmecmd.2025.38.os10-11

Publication Timeline

2025

2

Frequent Co-Authors

Hiroya Iwashiro

Takuya Kusunoki