S

Researcher Profile

Sergey Y. Khmel

1

Publications

21

Citations

2

Co-Authors

1

Active Years

Publications

Journal Article IEEE Transactions on Plasma Science Oct 01, 2014

Synthesis of Amorphous Silicon Films With High Growth Rate by Gas-Jet Electron Beam Plasma Chemical Vapor Deposition Method

Evgeniy A. Baranov · Sergey Y. Khmel · Alexandr O. Zamchiy

10.1109/tps.2014.2352392 21 citations

Publication Timeline

2014

1

Frequent Co-Authors

Alexandr O. Zamchiy

Evgeniy A. Baranov