Modeling the Growth of Chiral Nanostructures by Glancing Angle Deposition

M. M. Chebokhin; O. S. Trushin

doi:10.1134/s1063739725601304

journal article Dec 01, 2025

Modeling the Growth of Chiral Nanostructures by Glancing Angle Deposition

M. M. Chebokhin O. S. Trushin

Russian Microelectronics Vol. 54 No. 8 pp. 989-994 · Pleiades Publishing Ltd

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Controlled Nanostructuring of Thin Films by Oblique Angle Deposition

O. S. Trushin, I. S. Fattakhov, M. M. Chebokhin et al.

Journal of Surface Investigation. X-ray, Synchrotr... 2024 10.1134/s1027451024701209

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Published: Dec 01, 2025
Vol/Issue: 54(8)
Pages: 989-994
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Cite This Article

M. M. Chebokhin, O. S. Trushin (2025). Modeling the Growth of Chiral Nanostructures by Glancing Angle Deposition. Russian Microelectronics, 54(8), 989-994. https://doi.org/10.1134/s1063739725601304

Modeling the Growth of Chiral Nanostructures by Glancing Angle Deposition

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