T

Researcher Profile

Tetsuo Shibutami

1

Publications

28

Citations

5

Co-Authors

1

Active Years

Publications

Journal Article Electrochemical and Solid-State Letters Jan 01, 2006

Seed Layer Free Conformal Ruthenium Film Deposition on Hole Substrates by MOCVD Using (2,4-Dimethylpentadienyl)(ethylcyclopentadienyl)ruthenium

Kazuhisa Kawano · Atsushi Nagai · Hiroaki Kosuge · Tetsuo Shibutami +2 more

10.1149/1.2200011 28 citations

Publication Timeline

2006

1

Frequent Co-Authors

Kazuhisa Kawano

Hiroshi Funakubo