D

Researcher Profile

Dimitrios Kazazis

🏛 Paul Scherrer Institut, Forschungsstrasse 111, Villigen PSI 5232, Switzerland

0000-0002-2124-2813

3

Publications

53

Citations

10

Co-Authors

2

Active Years

Publications

Journal Article Materials Today Aug 01, 2025

Ultralow line edge roughness of hybrid multilayer Extreme ultraviolet resist with vertical molecular wire structure

Jaehyuk Lee · Hyeonseok Ji · Chawon Koh · Juyeong Lee +18 more

10.1016/j.mattod.2025.04.007 6 citations

Open Access Journal Article ACS Nano Aug 20, 2024

Approaching Angstrom-Scale Resolution in Lithography Using Low-Molecular-Mass Resists (<500 Da)

Mohammad S.M. Saifullah · Anil Kumar Rajak · Kevin A. Hofhuis · Nikhil Tiwale +7 more

10.1021/acsnano.4c03939 38 citations

Open Access Journal Article RSC Applied Interfaces Jan 01, 2024

A novel water developable tetraphenyltin-based nonchemically-amplified molecular resist for sub-13 nm lithography

Zongsong Wang · Jinping Chen · Tianjun Yu · Yi Zeng +9 more

10.1039/d3lf00254c 9 citations

Publication Timeline

2025

1

2024

2

Frequent Co-Authors

Michaela Vockenhuber

Prajith Karadan

Gregory Denbeaux

Shuangqing Wang

Suresh Valiyaveettil